Dry film lamination station for soft lithography

 

Use lamination process to quickly and simply create your mold

We offer here a lamination kit working on dry film photoresist. You will find everything needed to create your microfluidic mold using a rolling mill machine. Dry film lamination allows excellent control of the height of your micro-structures and your molds can be fabricated in less than an hour.  It is also cleaner, faster and cheaper than its resin-based cousin.

  • Fast protocols (under 1h)

  • Perfect control of structure heights

  • Cheaper than resin-based lithography

  • Clean and neat process

Benefits

  • Highly reproducible processes for your chip fabrication
  • Include a fully automatic plasma cleaner for PDMS bonding
  • A fast fabrication process and develop your chip in 24h
  • Take advantage of our knowledge for your soft-lithography process equipment

Included

Equipments

  • Complete air plasma system
  • Oven for fast PDMS curing
  • Desiccator for PDMS degassing

To do PDMS membrane a spin coater can be add in option.

Accessories & Chemicals

All chemicals (PDMS, Isopropanol, Acetone, etc.) and all lab accessories (glass slides, Petri dishes, disposable cups, stirring rods, scalpels, etc.) are included, in order to provide you the most complete set.

Chemicals-microfluidic-SU8-developer-isopropanol-aceton-TMCSAccessory-microfluidic-PDMS molding

We give you all the product references and providers information to refill your stock.

Support

Standard support pack: We take care of the after sale of all your instruments, we provide you microfabrication process-sheet and tutorials, we provide you 1 years phone assistance to answers any microfabrication questions you could have.

Extended support pack: In addition to standard pack our R&D team  install the softlithobox directly in your labs, we adapt on site all our microfabrication process to your needs and we train your team until there become ready to fabricate all your microfluidic chips.

Our specialists selected and adapted the best instruments to make them work together with reliable process. You can find here a short description of the equipment. Please don’t hesitate to contact us to have more information and keep in mind that we have several model to fit for the best your needs.

ROLLING-MILL

Lamination kit dry film microfabrication microfluidique chipRolling mill machine working with 6 rolls with 4 heating. The speed and the temperature can be adapted according to the application and can be use for thickness up to 3mm. The rolls can move toward and backward and are easily cleanable.

A device adapted for Soft-lithography applications

The wide speed and temperature range offers the possibility to work with different kind of dry film photoresist and even to imagine 3D structures by laminating on pre-design layers. It’s small and easy to use tool perfect to be installed everywhere especially outside a clean room.

 Major strengths:

  • Easy to use
  • Work with any dry film photoresist
  • Wide range of speed (up to 1,3m/min) and temperature (up to 140°C)
  • Digital panel for a perfect control of the parameters
  • Easy to clean

UV LAMP SYSTEM

UV LAMP BLACK photolithography Programmable-UV-lampAn unique UV LED exposure and masking system (in option) with available light sources at wavelengths of 365 nm or 385 nm. This is a very compact table-top system capable of exposing a wafer surface area of up to 4 inches in diameter. This automatic UV system is compatible with hard (physical) or soft (proximity) masking contacts, and features variable mask to substrate distance control.

A device adapted for Soft-lithography applications

With 2μm resolution, the device is particularly well tuned for soft-lithography applications. The exposure in flash enables to reduce the internal mechanical stress of the photoresist. Its little size enables to install it everywhere you want, especially outside a clean room.

 Major strengths:

  • Perfectly monochromatic exposure over the wafer surface area (bandwidth lower than 10 nm)
  • Cold UV exposure
  • Divergence angle of the light < 2°
  • Strong power density
  • Long LED lifetime: more than 10 000 hours equivalent to 8 – 10 years of use
  • User-friendly touch screen interface for exposure cycles programming
  • No warm-up time required
  • Intuitive control of UV source intensity
  • Automated wafer loading and unloading system
  • Usable with glass and plastic photomask
  • High UV uniformity on 4 inches wafer
  • Integrated UV meter

PROGRAMMABLE HOT PLATE

Tutorial SU8 photoresist baking during photolithography process - hot plateEnsure accurate, homogeneous and stable temperature set points. This digital hotplate device enables to set temperature ramp for heating and cooling down. Make your life easier with its programmable controls which enable to automatize your photolithography process.

A device adapted for Soft-lithography applications

Its aluminum top plate and its great heating surface area enables to have a wide enough zone where the temperature is homogeneous for an efficiently bake of photoresist on a 4 inches wafer. The temperature ramp enables to reduce the mechanical stress inside the photoresist layer. The programmable tool enables to do long photoresist bakes without staying in front of the device.

Major strenghts:

  • Temperature ramp to heat up and cool down.
  • High temperature uniformity over 4 inches wafer
  • Microprocessor display maintains consistent temperature
  • Minimal temperature overshoot
  • Automatic timer
  • Smoothed aluminium plate for easy photoresist cleaning

AN ADAPTIVE OFFER!

Since each laboratory is different, since each research is unique, we do adapt the offer to be as close as possible of the real need. We discuss together what will be the best efficient facility and thus add or remove equipment, accessories, chemicals…

Do not hesitate to ask one of our technico-commercials to make an assessment of your facility and to advice you on your project.

OPTIONS

We have created basic offers with everything needed to have a complete working set, but some options or some modification can be done to fit better your needs. Please have a look on our product overview lo learn more about the options.

Besides this we gather here a selection of side equipment more suitable for your dry film lamination station.

 

Air compressor

air compressor microfluidic microfabrication processA fitted air compressor up to 8 bar to replace any gas line of your lab.

Developer agitator

Developer agitator SU8 softlthography microfluidic microfabrication processTo easily develop your thick layer of photoresist you can use this developer tool, it will give you the best shaking during all your development time.

Non contractual pictures – BlackHole Lab reserves the right to modify any item without prior notice

For general information

For further information, do not hesitate to contact our team of experts:

contact@blackholelab.com or phone: +33(0).782.831.207

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